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Structural and optical properties of Si nanocrystals embedded in SiO 2/SiN x multilayers
Structural and optical properties of Si nanocrystals embedded in SiO 2/SiN x multilayers
2009
F. Delachat
M. Carrada
G. Ferblantier
A. Slaoui
C. Bonafos
S. Schamm
H. Rinnert
Keywords:
Nanocrystal
Condensed matter physics
Silicon nitride
Physics
Superlattice
Phase (matter)
Annealing (metallurgy)
Solar cell
Electron cyclotron resonance
Wafer
Molecular physics
Correction
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