Inspection of complex internal surface shape with fiber-optic.Sensor II: For specular tilted surface measurement

2001 
-Complex surface shape measurement has been a focus topic in the CAD/CAM field. A popular method for measuring dimensional information is using a 3D coordinate measuring machine (CMM)with a touch trigger probe. The measurement set up with CMM, however, is a time consuming task and the accuracy of the measurement deteriorates as the speed of measurement increase. Non-contact measurement is favored since high speed measurement can be achieved and problems with vibration and friction can be eliminated. Although much research has been conducted in non-contact measurement using image capturing and processing schemes, accuracy is poor and measurement is limited. Some optical technologies developed provide a good accuracy but the dynamic range and versatility is very limited. A novel fiber-optic sensor used for the inspection of complex internal contours is presented in this paper, which is able to measure a surface shape in a non-contact manner with high accuracy and high speed, and is compact and flexible to be incorporated into a CMM. Modulation functions for tilted surface shape measurement, based on the Gaussian distribution of the emitting beam from single-mode fiber (SMF), were derived for specular reflection. The feasibility of the proposed measurement principle was verified by simulations.
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