Design of S-Shaped Path and Velocity Profile of Moving Stage Using Three Point Locations

An exact curved path has to be fixed and velocity profile for travelling on the curved path is required by a moving stage. In this study, we decide the curved path on the basis of the information on three point locations. The path of the moving stage is traced by simulating the designed curve path and the velocity profile, and the results are compared with the given three points to determine how closely the moving stage follows the given path. Further, we propose a method to calibrate a curved path and velocity profile. The proposed moving paths were evaluated by performing experiments. Finally, the designed curved path and the actual path were compared.