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(Invited) Ga2O3 Phase Control and Heterojunctions Using Plasma-Enhanced Atomic Layer Epitaxy
(Invited) Ga2O3 Phase Control and Heterojunctions Using Plasma-Enhanced Atomic Layer Epitaxy
2020
Virginia D. Wheeler
N. Nepal
David R. Boris
Scott G. Walton
Syed B. Qadri
Jason R. Avila
David J. Meyer
Brian P. Downey
Vikrant J. Gokhale
Andrew C. Lang
Rhonda M. Stroud
Luke O. Nyakiti
Andrew D. Koehler
G.M Foster
Marko J. Tadjer
Mark S. Goorsky
Charles R. Eddy
Keywords:
Optoelectronics
phase control
Materials science
Plasma
Atomic layer epitaxy
Heterojunction
Correction
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