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Annealing and Characterization of Niobium Oxide Films Deposited With Atomic Layer Deposition
Annealing and Characterization of Niobium Oxide Films Deposited With Atomic Layer Deposition
2019
Andrew H. Rowley
Zachary R. Robinson
Alexander C. Kozen
Mark E. Twigg
Sharka M. Prokes
Keywords:
Atomic layer deposition
Chemical engineering
Niobium oxide
Annealing (metallurgy)
Materials science
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