The growth of BaTiO3 films on (001) MgAl2O4 substrates by pulsed laser deposition technique

Abstract The microstructural evolution of the BaTiO 3 films grown on (001) MgAl 2 O 4 spinel substrates at different temperatures by means of pulsed laser deposition technique is studied via transmission electron microscopy (TEM). The BaTiO 3 film grown at 850 °C consists of columnar grains of random orientations. Once the substrate temperature is over 900 °C, the BaTiO 3 films grow on (001) MgAl 2 O 4 substrates epitaxially. The cross-sectional TEM study reveals that the boundaries and interfaces act as the sources to emit stacking faults and twins which are detrimental to the film quality. The quality of epitaxial films increases with the growth temperature, and is optimized at the growth temperature of 1050 °C. The evolution of film microstructures with the growth temperature is discussed in view of the growth temperature, the surface structure of MgAl 2 O 4 substrates, and the phase transition of BaTiO 3 .