Atomic force microscope integrated with a scanning electron microscope for tip fabrication
1994
In a new combined atomic force microscope/scanning electron microscope, we have been able to fabricate and test electron‐beam‐deposited tips (e‐beam tips). With this instrument it was possible to test newly grown e‐beam tips within a few minutes of their formation, without ever breaking vacuum. Typical results on oxide‐sharpened conventional tips showed that the radius of curvature could be reduced by a factor of 2.5 with the e‐beam tips.
Keywords:
- Electrochemical scanning tunneling microscope
- Physics
- Scanning Hall probe microscope
- Conventional transmission electron microscope
- Conductive atomic force microscopy
- Analytical chemistry
- Microscope
- Local oxidation nanolithography
- Optics
- Low-voltage electron microscope
- Electron microscope
- Electron beam-induced deposition
- Atomic de Broglie microscope
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