Continuous vacuum coating plant for coating substrates
2010
Continuous vacuum coating plant for coating substrates (9) comprising a vacuum coating chamber (1), which partition walls (2) separating the vacuum coating chamber (1) each of an adjacent chamber, and having side walls (3), a bottom plate (4) is sealed and a lid (5) to the outside and evacuated by a vacuum pumping system; a transport means (8) for the transport of substrates to be coated (9) in a substrate transport plane (13); a magnetron (6) provided with a target (7) is provided, wherein the target surfaces of the transport device (8) opposite one another, characterized in that an opening formed as a blind or roller blind movable cover (12) between side walls (3), intermediate walls (2 coverable) and the transport device (8) extendable, the transport device (8) on one side of the vacuum coating chamber (1) is articulated.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI