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A Study of Surface-Tensile-Stress Induced Polishing-Voids in Cross-Point Phase-Change-Memory Cells
A Study of Surface-Tensile-Stress Induced Polishing-Voids in Cross-Point Phase-Change-Memory Cells
2020
Soo Bum Kim
Keywords:
cross point
Phase-change memory
Void (astronomy)
Polishing
Materials science
Composite material
Stress (mechanics)
Correction
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