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Determination of ultratrace phosphorus and titanium on silicon wafer surface by high resolution ICP-MS
Determination of ultratrace phosphorus and titanium on silicon wafer surface by high resolution ICP-MS
2001
Yuji Yamada
Tetsuya Tachibe
Ayako Shimazaki
Miyuki Takenaka
Shoji Kozuka
Keywords:
Titanium
Inductively coupled plasma mass spectrometry
Phosphorus
Inorganic chemistry
Wafer
Analytical chemistry
Materials science
high resolution
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