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A Brief Review of Plasma Enhanced Atomic Layer Deposition of Si 3 N 4
A Brief Review of Plasma Enhanced Atomic Layer Deposition of Si 3 N 4
2019
You Jin Ji
Ki Seok Kim
Ki-Hyun Kim
Ji Young Byun
and Geun Young Yeom
Keywords:
Analytical chemistry
Atomic layer deposition
Plasma
Materials science
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