Confocal imaging algorithm for profiling rough surfaces with non-gaussian spectra

2003 
The confocal imaging algorithm is applied to retrieve the profile of 1-D rough surfaces with non-gaussian spectra. Different forms of the autocovariance function are tried in the simulation, gaussian included for reference. The capability and the limitations of the algorithm for each function are to be set in terms of the parameters of roughness such as the rms and the correlation length.
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