Large Remnant Polarization in a Wake-Up Free Hf0.5Zr0.5O2 Ferroelectric Film through Bulk and Interface Engineering

Alireza Kashir,Hyungwoo Kim,Seungyeol Oh,Hyunsang Hwang

Large Remnant Polarization in a Wake-Up Free Hf0.5Zr0.5O2 Ferroelectric Film through Bulk and Interface Engineering

2021

Alireza Kashir
Hyungwoo Kim
Seungyeol Oh
Hyunsang Hwang

A wake-up free Hf0.5Zr0.5O2 (HZO) ferroelectric film with the highest remnant polarization (Pr) value to date was achieved through tuning of the ozone pulse duration, the annealing process, and the...

Keywords:

Optoelectronics
Stress (mechanics)
Leakage (electronics)
Schottky barrier
Materials science
Wake
Pulse duration
Annealing (metallurgy)
Polarization (waves)
Ferroelectricity

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