A novel soft switching two-stage heating power supply topology for silicon growth furnace

Mono-crystalline silicon is widely applied in the photovoltaic and the integrated circuit industry. Heating power supply, as the key element of the mono-crystalline silicon growth furnace, plays an important role in the performance of the whole furnace. In this paper, we propose a new kind of two-stage silicon growth furnace heating power supply topology structure. The first stage three phase rectifier employs the compound active clamp zero voltage soft switching (CACZVS) three-phase power factor correction (PFC) converter to achieve unity power factor and DC bus voltage regulation, and the second stage DC/DC converter employs phase shifted full bridge zero voltage and zero current soft switching converter (FB-ZVZCS) to regulate the output power. Compared with the heating power supply of non-controlled rectifier type or three-phase power factor correction circuit using hard switching, the proposed two-stage converter structure can achieve high power factor, high efficiency and more flexibility of control. The simulation results show the correctness of the analysis.