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The Influence of Adsorption Kinetics on Copper Superfilling for Dual Damascene
The Influence of Adsorption Kinetics on Copper Superfilling for Dual Damascene
2016
Romy Liske
Robert Krause
Benjamin Uhlig
L. Gerlich
Sascha Bott
M. Wislicenus
Axel Preusse
Keywords:
Inorganic chemistry
Chemistry
Adsorption
Copper interconnect
Copper
Kinetics
adsorption kinetics
Correction
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