600-GHz-band Silicon Dielectric Waveguide Module

We propose a novel 600-GHz-band silicon dielectric waveguide module for terahertz-band applications. The I/O interface of the proposed module is compatible with a standard waveguide flange, WR-1.5, which is intended for use with other conventional hollow-waveguide-packaged components. The design and fabrication of the module is evaluated based on both simulation and experimental results. Using this module, an insertion loss as low as 0.2 dB was achieved, thereby indicating its superiority over the conventional metallic hollow waveguide in the 600 GHz band.