Effects of liquid encapsulation on dopant segregation during czochralski growth

Abstract Effects of liquid B 2 O 3 encapsulation on crystal growth and segregation were investigated using Ga-doped germanium. Encapsulation is found to stabilize the melt, thus reducing convective melt flows from the turbulent to the laminar regime; it results in the disappearance of microsegregation inhomogeneities and permits the elimination of radial segregation at a seed rotation rate of 20 rpm. Rotation induced forced convection in the encapsulant leads to peripheral segregation effects which do not reflect rotational periodicity and are not growth rate controlled.