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Fundamental Study on Fabrication of Thickness-Shear Vibration Thin Resonator Using Si Anisotropic Etching
Fundamental Study on Fabrication of Thickness-Shear Vibration Thin Resonator Using Si Anisotropic Etching
2021
Junki Shinohara
Youhei Suzuki
Fumihito Kato
Noriyasu Masumoto
Hiroyuki Noguchi
Keywords:
Resonator
Composite material
thickness shear
fundamental study
Materials science
Fabrication
anisotropic etching
Vibration
Correction
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