Designing a robust MEMS AC voltage reference source using artificial neural network

One electronic circuit is described in which the pull-in voltage of capacitive microelectromechanical system (MEMS) devices is applied as a reference for a stable alternating voltage source at frequencies between 5 kHz and 100 kHz. The circuit is a simple harmonic oscillator. This paper uses artificial neural network as a compensator. Artificial neural network decreases temperature effect. The simulation results are very promising.