A process for the deposition of zinc oxide on a substrate
2015
The present invention relates to a method for the deposition of zinc oxide on a substrate is used in which zinc oxide as a source material. The zinc oxide is thereby reduced in a first stage to form elemental zinc, elemental zinc generated in situ is carried out in vapor form to a substrate to be coated, and there exposed to an oxidizing atmosphere. Here is a deposit of zinc oxide instead of on a surface of the substrate. The invention is characterized in that is used for the reduction of zinc oxide used as a source material for elemental zinc either methane or other reducing agent, which releases at the prevailing conditions in the reduction of methane and / or methyl radicals by thermal decomposition. The resulting zinc-gas stream is used in another part of the reactor with a supply of oxygen or other oxidizing substances directly to the deposition of crystalline zinc oxide layers.
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