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Plasma polymerization of 2-chloro-p-xylene to produce a crystalline plasma parylene C film
Plasma polymerization of 2-chloro-p-xylene to produce a crystalline plasma parylene C film
2013
Isabel C Estrada-Raygoza
Stephan L. Thamban
Lawrence Overzet
Matthew Goeckner
Keywords:
Plasma
2-chloro-p-xylene
Plasma polymerization
Parylene C
Nuclear chemistry
Crystal
Chemistry
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