Design, Modeling and Analysis of a Novel Flexure-guided 3-DOF Fast Tool Servo Device

A piezo-actuated flexure-guided three-degrees of freedom (3-DOF) fast tool servo (FTS) device is presented in this paper, a kind of microstructure surface machining device, which is designed to achieve the motion and compensate the error along the three axes $x-,\ y$ - and $z$ - so as to cater for the rigorous requirements and the increasingly extensive demands of the optical elements with microstructure surfaces. Matrix-based compliance modeling (MCM) method and the theory of vibration are adopted for the static modeling and the dynamic modeling of the device, respectively. Then, the established models are validated by finite element analysis (FEA) via software. The evaluated results show the satisfactory performance of the proposed 3-DOF FTS device, demonstrating its great potential to achieve microstructure surface machining with better accuracy.