A configuration oxide - metal multilayer film / silicon solar cell

The present invention discloses a structure of an oxide - metal multilayer film / silicon solar cell, the solar cell structure comprising successively from top to bottom: a silver electrode, an oxide - metal multilayer film, the passivation layer, a silicon body and the aluminum back electrode, said oxide - metal multilayer film made of a first oxide film, a metal oxide thin film and the second compound from said first or second oxide film is an oxide film MoO3 film, tin-doped In2O3 film, fluorine-doped SnO2 film or aluminum-doped ZnO film, the metal thin film is Ag, Au or Al thin film. The battery can be avoided conventional thermal diffusion or ion implantation Preparation of Auger recombination and emission phenomena electrode layer caused death. Also discloses a structure of an oxide - Preparation metal multilayer film / silicon solar cell, the method manufacturing process less suitable for mass production, without high-temperature throughout the preparation.