Old Web
English
Sign In
Acemap
>
Paper
>
Applications of Automated High Resolution Strain Mapping in TEM on the Study of Strain Distribution in MOSFETs
Applications of Automated High Resolution Strain Mapping in TEM on the Study of Strain Distribution in MOSFETs
2014
Amith Darbal
Raman D. Narayan
C. Vartuli
Toshihiro Aoki
John Mardinly
S. Nicolopoulos
Jon Karl Weiss
Keywords:
Analytical chemistry
Strain (chemistry)
Materials science
high resolution
strain distribution
strain mapping
Metallurgy
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
11
Citations
NaN
KQI
[]