Synthesis of the Autocorrelation Function for Solving the Thin Film Reflectometry Inverse Problem
2019
A method is proposed to estimate (using the autocorrelation function (ACF)) the thickness of layers determining the electron density profile of a thin film. The method does not require additional conditions and is applicable to an arbitrary reflectivity curve. It is based on the ACF synthesis by a superposition of Gaussians, whose parameters are related to the characteristics of the film layers and interfaces. The potential of this method is demonstrated by a number of model examples.
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