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Dedication Load Based Dispatching Rule for Load Balancing of Photolithography Machines in Wafer FABs
Dedication Load Based Dispatching Rule for Load Balancing of Photolithography Machines in Wafer FABs
2017
Kang Hoon Cho
Yong-Ho Chung
Sang-Chul Park
Keywords:
Load balancing (computing)
Manufacturing engineering
Photolithography
Real-time computing
Wafer
Engineering
Reliability engineering
Correction
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