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Progress Toward a Quantitative Understanding of Solvent Vapor Annealing for Block Copolymer Lithography
Progress Toward a Quantitative Understanding of Solvent Vapor Annealing for Block Copolymer Lithography
2014
Brian C. Stahl
Keywords:
Annealing (metallurgy)
Solvent
Copolymer
Lithography
Polymer chemistry
Chemistry
solvent vapor
Chemical engineering
Correction
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