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Metal-Assisted Etching of Silicon: Activity of Metal Catalysts and Control of Porous Structure
Metal-Assisted Etching of Silicon: Activity of Metal Catalysts and Control of Porous Structure
2015
Shinji Yae
Naoki Fukumuro
Susumu Sakamoto
Keywords:
Etching
Porosity
Inorganic chemistry
Catalysis
Ceramic materials
Materials science
Metal
Silicon
Chemical engineering
metal catalyst
Correction
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