A 40–200 kV ion accelerator with three beam lines

Abstract The accelerator (mass range 1–86) consists of: • a. A sputter-ion source or a duoplasmatron with extraction electrode, Einzellens, analysing magnet and associated power supplies, mounted inside a metal box at high voltage. • b. A three-cylinder accelerating lens with the last cylinder at ground potential. The central cylinder is to follow a non-linear relation to the accelerating voltage to focus the beam at the mass defining diaphragm at a fixed position. • c. A combination of an electrostatic quadrupole triplet, a second diaphragm, a three-port switch magnet and another triplet. The two diaphragms make it possible to control beam radius and divergence (max. 1°) independently.