Low energy Fe+ beam irradiation to C60 thin film

We have developed an electron cyclotron resonance ion source apparatus, which is designed for the production of endohedral fullerene. In this study, we irradiated the Fe+ beam to the C60 thin film. We changed the experimental condition of the dose and the ion energy. We could observe the Fe + C60 peak by analysis of the time-of-flight mass spectrometry. The highest intensity of the Fe + C60 peak was observed at the ion energy of 200 eV. The Fe + C60 peak intensity tended to become high in the case of long irradiation time and large dose.