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A new improved vertical comb type differential capacitive sensing micro accelerometer using SOI wafer technology
A new improved vertical comb type differential capacitive sensing micro accelerometer using SOI wafer technology
2020
Manoj Kumar Dounkal
R. K. Bhan
Navin Kumar
Keywords:
Electronic engineering
Capacitive sensing
Materials science
Wafer
Accelerometer
Silicon on insulator
Optoelectronics
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