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Fabrication of on-chip nanofluidic channels by using sacrificial photoresist templated SiO2 sputter deposition
Fabrication of on-chip nanofluidic channels by using sacrificial photoresist templated SiO2 sputter deposition
2006
Sung Min Kang
Bonghyun Park
Il-Sik Nam
Chaehyun Lim
Heongkyu Ju
Seung-Beck Lee
Keywords:
Nanotechnology
Physics
Sputter deposition
Chip
Photoresist
Fabrication
Correction
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