Wafer Bonding and Heterogeneous Integration

2008 
The use of bonding technology to integrate III-V opto-electronic components on top of a silicon-on-insulator (SOI) integrated waveguide circuit is presented. III-V laser diodes and photodetectors fabricated on and coupled to an underlying SOI waveguide circuit are considered.
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    2
    References
    0
    Citations
    NaN
    KQI
    []