Hyperabrupt-junction varactor for mmWave SiGe:C BiCMOS, enabling 77GHz VCO/TX with 13-15GHz tuning range

A millimeter-wave hyperabrupt-junction varactor (HAVAR) enabling 77GHz VCO/TX with 13–15GHz tuning range and better than −70dBc/Hz phase noise at 100kHz offset has been integrated in SiGe:C BiCMOS for automotive radar products. The HAVAR predominantly uses existing processes for low-cost integration and minimal process complexity. Optimization of TR-Q thru HAVAR width allows TR up to 2.7 and Q min up to 10.