Application of scanning electron acoustic microscope to ferroelectric semiconductor material:BaTiO3+Y2O3

Abstract In this paper, Scanning Electron Acoustic Microscope (SEAM) is used to investigate ferroelectric semiconductor ceramics BaO3+Y2O3. The linear electron acoustic amplitude images about the nature surface features of this material were successfully obtained at different modulated frequencies. Electron acoustic signal generation and image contrast mechanisms are discussed. By means of analyzing surface and subsurface structure, ferroelectric and semiconductor properties of ferroelectric semiconductor materials from electron acoustic images we try to build a new way to characterize ferroelectric semiconductor materials on a micro-scale.