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Vapor Growth of 3C-SiC Using the Transition Layer of 3C-SiC on Si CVD Templates
Vapor Growth of 3C-SiC Using the Transition Layer of 3C-SiC on Si CVD Templates
2019
Philipp Schuh
Ulrike Künecke
G. Litrico
Marco Mauceri
Francesco La Via
Sylvain Monnoye
Marcin Zieliński
Peter J. Wellmann
Keywords:
Materials science
Metallurgy
Composite material
Template
sublimation epitaxy
vapor growth
transition layer
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