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Classical Molecular Dynamics and Self-Consistent Tight-Binding Simulations of Si-Si Wafer Bonding.
Classical Molecular Dynamics and Self-Consistent Tight-Binding Simulations of Si-Si Wafer Bonding.
2000
J.G. LePage
Jeongnim Kim
John W. Wilkins
Florian Kirchhoff
Keywords:
Chemical physics
Wafer bonding
Tight binding
Molecular dynamics
self consistent
Materials science
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