Production method and the transparent conductive film of the transparent conductive film, a device using elements, conductive substrate and it transparent using the same

A by a coating method is a method for producing a low-cost and simple transparent conductive film, both excellent transparency and high conductivity, which is formed in particular low-temperature heating of less than 300 ° C., and a transparent conductive film excellent in film strength , and to provide a manufacturing method of the transparent conductive film. A coating step of forming a coating film containing an organic metal compound on a substrate, forming a drying step, an inorganic film the dry coating film heated by irradiating an energy beam while forming a dry coating film from the coating film heat energy ray irradiation step of, if necessary, a method for producing a transparent conductive film formed through the steps of heat reduction step, the heat energy ray irradiation step, the dew point temperature of -10 ° C. the dried coated film under the following oxygen-containing atmosphere, while heating to a heating temperature below 300 ° C., subjected to energy ray irradiation, a conductive oxide mainly composed of metal oxides by removal of the organic components contained in the dry coating film the microparticle is method for producing a transparent conductive film for forming the conductive oxide microparticles layer was densely filled. .Field