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Selectively Grown Vertical Si p-MOS Transistor with Reduced Overlap Capacitances
Selectively Grown Vertical Si p-MOS Transistor with Reduced Overlap Capacitances
1998
Klaes
Moers
Tonnemann
Wickenhauser
Vescan
Marso
Kordos
Luth
Grabolla
Keywords:
Epitaxy
Parasitic capacitance
Optoelectronics
Lithography
Etching (microfabrication)
Magnetoresistance
Transistor
CMOS
Silicon
Materials science
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