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Amorphous silicon solar cells at high deposition rates using newly developed PECVD
Amorphous silicon solar cells at high deposition rates using newly developed PECVD
2003
Komoda
Niira
Senta
Nishimura
Hakuma
Okui
Aramaki
Okada
Tomita
Higuchi
Arimune
Keywords:
Deposition (chemistry)
Band gap
Plasma-enhanced chemical vapor deposition
Optoelectronics
Amorphous silicon
Hydrogen
amorphous semiconductors
Energy conversion efficiency
Silicon
Materials science
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