Physical and Mechanical Properties, Effect of Thermal Annealing in Vacuum and in Air on Nanograin Sizes in Hard and Superhard Coatings Zr-Ti-Si-N

Zr-Ti -Si-N coating had high thermal stability of phase composition and remained structure state under thermal annealing temperatures reached 1180 o C in vacuum and 830 o C in air. Effect of isochronous annealing on phase composition, structure, and stress state of Zr-Ti-Si-N- ion- plasma deposited coatings (nanocomposite coatings) was reported. Below 1000 o