The structure, oxygen vacancies and magnetic properties of TiOx (0 < x < 2) synthesized by plasma assisted chemical vapor deposition and reduction
2018
Abstract TiO 2 thin film was deposited by Plasma Assisted Chemical Vapor Deposition (PECVD), and TiO x (0 x thin film, which could bring large impacts on the magnetic properties of the thin films. A higher concentration of oxygen vacancies resulted in larger ferromagnetic behaviors.
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