Design and Analysis of On-package Inductor of an Integrated Voltage Regulator for High-Q Factor and EMI Shielding in Active Interposer based 2.5D/3D ICs

On-package inductor, a promising type of filter inductor for integrated voltage regulator (IVR) requires low loss and shielding structure for high IVR efficiency and vertical noise coupling. In this paper, we proposed a novel on-package inductor of an integrated voltage regulator for high-Q factor and EMI shielding in active interposer based 2.5D/3D ICs. The proposed on-package inductor is composed of 4 parallel spiral loops and a shielding loop. The proposed inductor is verified with simulation and measurement in frequency domain. It achieves both high-Q factor and high shielding effectiveness using the package re-distribution layers only. With its shielding structure, vertical magnetic noise coupling to a noise sensitive circuit block on active interposer is successfully suppressed by 25.5 dB and normal operation of circuit is ensured.