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Developments of Atomic Layer Etch Processes and their Applications in Fabricating III-V Compound Semiconductor Devices
Developments of Atomic Layer Etch Processes and their Applications in Fabricating III-V Compound Semiconductor Devices
2019
Xu Li
Yen-Chen Fu
Sung-Jin Cho
Dilini Hemakumara
Konstantinos Floros
David A. J. Moran
I.G. Thayne
Keywords:
Optoelectronics
Compound semiconductor
layer
Materials science
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