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Synthesis of Ti Aluminides from Ti/Al Laminated Films by Magnetron Sputtering
Synthesis of Ti Aluminides from Ti/Al Laminated Films by Magnetron Sputtering
1994
Hiroyuki Umehara
Takakazu Suzuki
Ryuichi Hayashi
Keywords:
Sputter deposition
Metallurgy
Inorganic chemistry
Materials science
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