On the reliability of probe diagnostics in RF plasma

The errors of probe diagnostics of the resting or slow-moving plasma of Q-machines or dc discharges are shown to lie typically within a range of ±(20–30)%. Problems of probe diagnostics of RF plasma and modern approaches to their solving are considered. The objectivity of probe diagnostics of RF plasma is established by the mutual agreement between the electron energy distribution functions measured in the same experiment using the Langmuir probes and the method of relative intensities of spectral lines.