Low-Capacitance SCR for On-Chip ESD Protection with High CDM Tolerance in 7nm Bulk FinFET Technology

A low-capacitance silicon-controlled rectifier for high speed I/O pad protection is implemented with TSMC 7nm bulk FinFET technology. It can achieve much higher ESD robustness per capacitance with better dynamic on-resistance and faster turn-on speed for CDM protection as compared to the prior art.