Towards 19% efficient industrial PERC devices using simultaneous front emitter and rear surface passivation by thermal oxidation

Higher solar cell efficiencies enable a reduction of the cost per watt ratio, if production effort is maintained at an acceptable level. A proven high-efficiency concept is the passivated emitter and rear cell (PERC) [1]. However, the transfer of this solar cell structure from demonstrator level to industrial application is challenging. We present a simple approach for the industrial fabrication of PERC solar cells which utilizes the simultaneous passivation of the front emitter and the rear surface by a thin layer of thermally grown oxide. This Thermal Oxide Passivated All Sides (TOPAS) structure represents an industrially feasible implementation of the PERC concept.