Dopant incorporation efficiencies of SiC crystals grown on {1 1 00}-face

The dopant incorporation efficiencies of SiC bulk single crystals were investigated by the measurement of optical absorption coefficients and chemical analysis by Glow Discharge Mass Spectroscopy. The SiC crystals were grown on the seed with the {1100} face by a sublimation method. The grown ingot consisted of approximately three parts, which were the regions grown with the {1100} face (I), the {ll0n} face (II) and the {ll0n} face (III) as a growing front. The nitrogen concentrations in these parts were in the order of II>I>III. The wafers exhibited the color distributions in the c-plane due to the difference of the growing facet. The nitrogen incorporation efficiencies were discussed in terms of atomic structure on the surface. The aluminum concentration in the crystal grown on a {1100}-faced seed was in the medium between those in crystals grown on Si-face and C-face. On the other hand, the boron concentration was similar to that of Si-face grown crystal, and higher than that of C-face grown crystal.