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Preparation of In2O3:Sn (ITO) Films by Electron Beam Deposition
Preparation of In2O3:Sn (ITO) Films by Electron Beam Deposition
1987
V.T. Bich
N. N. Dinh
T. X. Hoai
N.H. Hoang
L.V. Hong
V. D. Mien
Keywords:
Nuclear magnetic resonance
Cathode ray
Electron beam physical vapor deposition
Ion beam deposition
Electron beam-induced deposition
Physics
Condensed matter physics
electron beam deposition
Atomic physics
Correction
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